Piezoelectric actuators in micropositioning

Author

Pozzi, Michele ; King, Tim

Author_Institution

Sch. of Textile Ind., Leeds Univ., UK

Volume

10

Issue

1

fYear

2001

fDate

2/1/2001 12:00:00 AM

Firstpage

31

Lastpage

36

Abstract

Micromachines can be built only with the aid of other machines that have micropositioning abilities. Fast and precise positioning devices are needed to increase reliability and speed in the production of the miniaturized devices. Intensive research effort has been devoted to developing new technologies for actuators and sensors. A wide range of technologies is now available and it is not possible to say that one is the best: rather there is a best choice for each application. Piezoelectric actuators are a well assessed technology and have already proven to offer good speed, precision and low power consumption characteristics. In this article, a small selection of new designs of piezoactuators is reviewed together with their applications

Keywords

micropositioning; piezoelectric actuators; impact drive mechanism actuators; impulse actuators; mechanical amplification; micromachines; micropositioning; miniaturized devices production; multilayer construction; piezoelectric actuators; reliability improvement; sensors; stick-and-slip actuators;

fLanguage

English

Journal_Title

Engineering Science and Education Journal

Publisher

iet

ISSN

0963-7346

Type

jour

DOI

10.1049/esej:20010105

Filename

905716