• DocumentCode
    1445108
  • Title

    Experimental Technique for Fatigue Testing of MEMS in Liquids

  • Author

    Ali, Shaikh Mubassar ; Mantell, Susan C. ; Longmire, Ellen K.

  • Volume
    21
  • Issue
    3
  • fYear
    2012
  • fDate
    6/1/2012 12:00:00 AM
  • Firstpage
    520
  • Lastpage
    522
  • Abstract
    An experimental technique for the fatigue testing of microelectromechanical systems (MEMS) in liquid environments is described in this paper. A bulk-micromachined MEMS tensile specimen with integral grips was fabricated, and tensile-tensile fatigue tests were performed in air and in a saline solution. The fatigue life of the 200-nm thick aluminum specimen was observed to range from 1.2 × 106 to 2.2 × 106 cycles when tested at equal values of the mean and alternating stresses of 0.13 GPa.
  • Keywords
    fatigue testing; micromachining; micromechanical devices; air; aluminum specimen; bulk-micromachined MEMS tensile specimen; fatigue life; integral grips; liquid environments; microelectromechanical systems; saline solution; size 200 nm; tensile-tensile fatigue tests; Fatigue; Laser beams; Liquids; Micromechanical devices; Springs; Stress; Testing; Corrosion; fatigue; microelectromechanical systems (MEMS); reliability; thin film;
  • fLanguage
    English
  • Journal_Title
    Microelectromechanical Systems, Journal of
  • Publisher
    ieee
  • ISSN
    1057-7157
  • Type

    jour

  • DOI
    10.1109/JMEMS.2012.2184082
  • Filename
    6150988
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1445108