Title :
Experimental Technique for Fatigue Testing of MEMS in Liquids
Author :
Ali, Shaikh Mubassar ; Mantell, Susan C. ; Longmire, Ellen K.
fDate :
6/1/2012 12:00:00 AM
Abstract :
An experimental technique for the fatigue testing of microelectromechanical systems (MEMS) in liquid environments is described in this paper. A bulk-micromachined MEMS tensile specimen with integral grips was fabricated, and tensile-tensile fatigue tests were performed in air and in a saline solution. The fatigue life of the 200-nm thick aluminum specimen was observed to range from 1.2 × 106 to 2.2 × 106 cycles when tested at equal values of the mean and alternating stresses of 0.13 GPa.
Keywords :
fatigue testing; micromachining; micromechanical devices; air; aluminum specimen; bulk-micromachined MEMS tensile specimen; fatigue life; integral grips; liquid environments; microelectromechanical systems; saline solution; size 200 nm; tensile-tensile fatigue tests; Fatigue; Laser beams; Liquids; Micromechanical devices; Springs; Stress; Testing; Corrosion; fatigue; microelectromechanical systems (MEMS); reliability; thin film;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2012.2184082
