Optical-fibre sensors using micromachined silicon resonant elements

A family of optical-fibre sensors is reported. Resonant structures may be fabricated by anisotropic etching techniques from single-crystal silicon. It has been shown that such structures may be excited and interrogated using optical-fibre links, and two such systems are described. The mechanical engineering of these devices into real transducers and the system aspects of multiplexing several transducers onto a single-fibre link are also considered.