Title :
Miniature silicon resonant pressure sensor
Author :
Greenwood, J.C. ; Satchell, D.W.
Author_Institution :
STC Technology Ltd., Harlow, UK
fDate :
7/1/1988 12:00:00 AM
Abstract :
An absolute barometric pressure sensor which has shown exceptional performance is described. It consists of a mechanical resonator whose resonant frequency is changed by strain induced by applied pressure. The active element is formed in one piece, from single-crystal silicon, by microengineering techniques. It has a range from vacuum to a pressure of over 1 bar (105 Pa) and can resolve less than 1 part in 105 of full scale.
Keywords :
barometers; pressure control; pressure measurement; pressure transducers; 0 to 1 bar; Si resonant pressure sensor; barometric pressure sensor; mechanical resonator; microengineering techniques; pressure measurement; resonant frequency;
Journal_Title :
Control Theory and Applications, IEE Proceedings D
