DocumentCode

1446336

Title

The scanning electron microscope and other electron-probe instruments

Author

Oatley, Charles

Author_Institution

University of Cambridge, Engineering Department, Electrical Engineering Group, Cambridge, UK

Volume

122

Issue

9

fYear

1975

fDate

9/1/1975 12:00:00 AM

Firstpage

942

Lastpage

946

Keywords

electron microscopes; electron probes; electron probe instruments; scanning electron microscope;

fLanguage

English

Journal_Title

Electrical Engineers, Proceedings of the Institution of

Publisher

iet

ISSN

0020-3270

Type

jour

DOI

10.1049/piee.1975.0254

Filename

5254031