Integrated micro-electro-mechanical sensor development for inertial applications

Author

Allen, J.J. ; Kinney, R.D. ; Sarsfield, J. ; Daily, M.R. ; Ellis, J.R. ; Smith, J.H. ; Montague, S. ; Howe, R.T. ; Boser, B.E. ; Horowitz, R. ; Pisano, A.P. ; Lemkin, M.A. ; Clark, W.A. ; Juneau, T.

Author_Institution

Sandia Nat. Labs., Albuquerque, NM, USA

Volume

13

Issue

11

fYear

1998

fDate

11/1/1998 12:00:00 AM

Firstpage

36

Lastpage

40

Abstract

Electronic sensing circuitry and micro-electro-mechanical sense elements can be integrated to produce inertial instruments for applications unheard of a few years ago. This paper describes the Sandia M³EMS fabrication process, inertial instruments that have been fabricated, and the results of initial characterization tests of micro-machined accelerometers

Keywords

CMOS integrated circuits; accelerometers; integrated circuit technology; microsensors; CMOS; M³EMS; Sandia M³EMS fabrication; Si; electronic sensing circuitry; inertial applications; inertial instruments; integrated micro-electro-mechanical sensor; micromachined accelerometers; tests; Accelerometers; CMOS process; CMOS technology; Fabrication; Instruments; Laboratories; Manufacturing processes; Microelectromechanical systems; Microelectronics; Micromechanical devices;

fLanguage

English

Journal_Title

Aerospace and Electronic Systems Magazine, IEEE

Publisher

ieee

ISSN

0885-8985

Type

jour

DOI

10.1109/62.730622

Filename

730622