DocumentCode
1447683
Title
A Sensing Device Using Liquid Crystal in a Micropillar Array Supporting Structure
Author
Cheng, Daming ; Sridharamurthy, Sudheer S. ; Hunter, Jacob T. ; Park, Joon-Seo ; Abbott, Nicholas L. ; Jiang, Hongrui
Author_Institution
Mater. Sci. Program, Univ. of Wisconsin, Madison, WI, USA
Volume
18
Issue
5
fYear
2009
Firstpage
973
Lastpage
982
Abstract
We present the design of a micropillar array that leads to the formation of stable and uniform liquid crystal (LC) thin films for sensing applications. Photolithography and electroplating methods were employed to fabricate the micropillar array. By using this microfabricated structure, thin films of LC (5CB: 4´-pentyl-4-cyanobiphenyl) were formed and stabilized against gravitational forces and mechanical shock. The geometric profile of the supported LC thin film was simulated by using finite element methods. Orientational ordering transitions of nematic LCs in the supported thin films were used to detect liquid- and vapor-phase analytes via changes in the intensity of light transmitted through the LCs. The LC thin films supported by these microfabricated structures were tested and found to respond to dimethyl methylphosphonate gas.
Keywords
electroplating; gas sensors; liquid crystal devices; liquid crystal phase transformations; nematic liquid crystals; photolithography; 4´-pentyl-4-cyanobiphenyl; dimethyl methylphosphonate gas; electroplating methods; finite element methods; gravitational forces; light transmission; liquid crystal thin films; liquid-phase analytes; mechanical shock; microfabricated structure; micropillar array supporting structure; nematic LC; ordering transitions; photolithography; sensing device; vapor-phase analytes; Dimethyl methylphosphonate (DMMP); liquid crystal (LC); microfluidics; micropillar; microsensor;
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/JMEMS.2009.2029977
Filename
5256208
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