• DocumentCode
    1447683
  • Title

    A Sensing Device Using Liquid Crystal in a Micropillar Array Supporting Structure

  • Author

    Cheng, Daming ; Sridharamurthy, Sudheer S. ; Hunter, Jacob T. ; Park, Joon-Seo ; Abbott, Nicholas L. ; Jiang, Hongrui

  • Author_Institution
    Mater. Sci. Program, Univ. of Wisconsin, Madison, WI, USA
  • Volume
    18
  • Issue
    5
  • fYear
    2009
  • Firstpage
    973
  • Lastpage
    982
  • Abstract
    We present the design of a micropillar array that leads to the formation of stable and uniform liquid crystal (LC) thin films for sensing applications. Photolithography and electroplating methods were employed to fabricate the micropillar array. By using this microfabricated structure, thin films of LC (5CB: 4´-pentyl-4-cyanobiphenyl) were formed and stabilized against gravitational forces and mechanical shock. The geometric profile of the supported LC thin film was simulated by using finite element methods. Orientational ordering transitions of nematic LCs in the supported thin films were used to detect liquid- and vapor-phase analytes via changes in the intensity of light transmitted through the LCs. The LC thin films supported by these microfabricated structures were tested and found to respond to dimethyl methylphosphonate gas.
  • Keywords
    electroplating; gas sensors; liquid crystal devices; liquid crystal phase transformations; nematic liquid crystals; photolithography; 4´-pentyl-4-cyanobiphenyl; dimethyl methylphosphonate gas; electroplating methods; finite element methods; gravitational forces; light transmission; liquid crystal thin films; liquid-phase analytes; mechanical shock; microfabricated structure; micropillar array supporting structure; nematic LC; ordering transitions; photolithography; sensing device; vapor-phase analytes; Dimethyl methylphosphonate (DMMP); liquid crystal (LC); microfluidics; micropillar; microsensor;
  • fLanguage
    English
  • Journal_Title
    Microelectromechanical Systems, Journal of
  • Publisher
    ieee
  • ISSN
    1057-7157
  • Type

    jour

  • DOI
    10.1109/JMEMS.2009.2029977
  • Filename
    5256208