DocumentCode :
1447777
Title :
Submillimeter Wave 
-Parameter Characterization of Integrated Membrane Circuits
Author :
Zhao, Huan ; Tang, Aik-Yean ; Sobis, Peter ; Bryllert, Tomas ; Yhland, Klas ; Stenarson, Jörgen ; Stake, Jan
Author_Institution :
Dept. of Microtechnol. & Nanosci., Chalmers Univ. of Technol., Göteborg, Sweden
Volume :
21
Issue :
2
fYear :
2011
Firstpage :
110
Lastpage :
112
Abstract :
We demonstrate S-parameter characterization of membrane circuits in the WR-03 frequency band (220-325 GHz) utilizing thru-reflect-line (TRL) -calibration technique. The TRL calibration kit design features 3 μm thick GaAs membrane circuits packaged in E-plane split waveguide blocks with the reference planes inside the membrane circuit structure. A 300 GHz membrane ring resonator filter circuit has been characterized by applying the proposed calibration kit, showing good agreement with simulations.
Keywords :
III-V semiconductors; gallium arsenide; membranes; resonator filters; submillimetre wave circuits; E-plane split waveguide blocks; GaAs; WR-03 frequency band; frequency 220 GHz to 325 GHz; integrated membrane circuits; membrane ring resonator filter circuit; size 3 mum; submillimeter wave S-parameter characterization; thru-reflect-line calibration; Biomembranes; Calibration; Integrated circuit modeling; Planar waveguides; Standards; Waveguide transitions; Calibration; THz circuits; membranes; monolithic integrated circuits; scattering parameter measurements; submillimeter wave measurements;
fLanguage :
English
Journal_Title :
Microwave and Wireless Components Letters, IEEE
Publisher :
ieee
ISSN :
1531-1309
Type :
jour
DOI :
10.1109/LMWC.2010.2097244
Filename :
5711413
Link To Document :
