Calibration of fly height measured by scattered total internal reflection

Fly height was measured using Scattered Total Internal Reflection (SCATIR). A calibration method for this technique was developed, and the results were compared to those from a Phase Metrics Dynamic Fly Height Tester (DFHT) II. Measurements from the two methods on the same slider agreed well in the region from 20-80 nm. SCATIR is at least comparable to three-wavelength interferometry, and potentially superior in that (i) signal intensity increases as the fly height decreases, (ii) calibration and measurement occur in one location, and (iii) the sensitivity can be optimized for a desired range of fly height