Precision X-Y robotic object handling using a dual GMR bridge sensor

Author

Ku, Wanjun ; Freitas, Paulo P. ; Compadrinho, Paulo ; Barata, Jose

Author_Institution

INESC, Lisbon, Portugal

Volume

36

Issue

5

fYear

2000

fDate

9/1/2000 12:00:00 AM

Firstpage

2782

Lastpage

2784

Abstract

A dual integrated GMR bridge sensor, which is able to simultaneously detect x and y components of an external magnetic field, was demonstrated, and applied to the precision robotic placement of objects. Two orthogonal GMR bridges are used, biased by two sets of integrated Co₇₈Pt₂₂ film permanent magnets with different coercivities (1230 Oe and 522 Oe, respectively). The field sensitivity is 0.35 mV/(V×Oe) in each field direction. For the positioning application, an absolute accuracy of 10 μm in x-direction has been achieved over more than 1900 cycles which is insensitive to sensor offsets and thermal drifts

Keywords

cobalt alloys; coercive force; giant magnetoresistance; magnetic sensors; manipulators; permanent magnets; platinum alloys; position measurement; 10 mum; Co₇₈Pt₂₂; coercivities; dual GMR bridge sensor; dual integrated GMR bridge sensor; external magnetic field; field sensitivity; integrated Co₇₈Pt₂₂ film permanent magnets; orthogonal GMR bridges; positioning; precision X-Y robotic object handling; sensor offset; thermal drift; Bridges; Coercive force; Iron; Magnetic multilayers; Magnetic sensors; Permanent magnets; Position control; Robot sensing systems; Robotics and automation; Sensor systems;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.908588

Filename

908588