• DocumentCode
    1448633
  • Title

    Influence of Surface Recombination on Forward Current–Voltage Characteristics of Mesa GaN \\hbox {p}^{+}\\hbox {n} Diodes Formed on GaN Free-Standing Substrates

  • Author

    Mochizuki, Kazuhiro ; Nomoto, Kazuki ; Hatakeyama, Yoshitomo ; Katayose, Hideo ; Mishima, Tomoyoshi ; Kaneda, Naoki ; Tsuchiya, Tadayoshi ; Terano, Akihisa ; Ishigaki, Takashi ; Tsuchiya, Tomonobu ; Tsuchiya, Ryuta ; Nakamura, Tohru

  • Author_Institution
    Central Res. Lab., Hitachi Ltd., Tokyo, Japan
  • Volume
    59
  • Issue
    4
  • fYear
    2012
  • fDate
    4/1/2012 12:00:00 AM
  • Firstpage
    1091
  • Lastpage
    1098
  • Abstract
    The influence of surface recombination on forward current-voltage (IF-VF) characteristics of gallium nitride (GaN) p+n diodes formed on GaN free-standing substrates was both experimentally and computationally investigated. In the temperature range of 373-273 K, the surface-recombination velocity 5 of 0.5-μm n GaN overetched circular-mesa diodes was derived, respectively, as 2-10 × 107 and 1 × 107 cm/s for diodes with and without a mesa-field-plate termination structure consisting of dielectric and metal layers. It was shown that IF (VF <; 2.9 V) is dominated by carrier recombination at the side surface of the etched n GaN. The IF-VF characteristics of the fabricated diodes were compared with the reported GaN p+n diodes with almost-zero overetched depth of n- GaN. The large IF of the latter diodes is attributed to enhanced photon recycling through photon reflection at the metal mirror. Moreover, reducing S to less than 105 cm/s is considered indispensible for achieving similar enhanced photon recycling in overetched terminated diodes.
  • Keywords
    gallium compounds; p-i-n diodes; surface recombination; wide band gap semiconductors; GaN; carrier recombination; dielectric layers; enhanced photon recycling; fabricated diodes; forward current-voltage characteristics; free-standing substrates; gallium nitride p+n diodes; mesa p+n diodes; mesa-field-plate termination structure; metal layers; metal mirror; overetched circular-mesa diodes; overetched depth; overetched terminated diodes; photon reflection; size 0.5 mum; surface recombination; surface-recombination velocity; temperature 373 K to 273 K; temperature range; Current measurement; Gallium nitride; Photonics; Recycling; Schottky diodes; Surface treatment; Gallium compounds; power semiconductor devices; simulation;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/TED.2012.2185241
  • Filename
    6152144