Title :
Pull-in study of an electrostatic torsion microactuator
Author :
Degani, Ofir ; Socher, Eran ; Lipson, Ariel ; Lejtner, T. ; Setter, Dan J. ; Kaldor, Shmuel ; Nemirovsky, Yael
Author_Institution :
Dept. of Electr. Eng., Technion-Israel Inst. of Technol., Haifa, Israel
fDate :
12/1/1998 12:00:00 AM
Abstract :
Pull-in study of an electrostatic microactuator is essential for making the electrostatic actuation more effective. In this paper, pull-in analysis is presented for an electrostatic torsion microactuator. The torsion microactuator can be used as a microtorsion mirror. A polynomial algebraic equation for the pull-in voltage and pull-in angle of a torsion microactuator is derived. Two types of microactuators fabricated using bulk micromachining are presented. Measurements done on the fabricated microactuators are reported, showing deviations within 1% error from the calculations
Keywords :
electrostatic actuators; micromachining; polynomials; torsion; bulk micromachining; electrostatic torsion microactuator; microtorsion mirror; polynomial algebraic equation; pull-in analysis; Electrostatic actuators; Electrostatic analysis; Electrostatic measurements; Equations; Microactuators; Micromachining; Mirrors; Polynomials; Torque; Voltage;
Journal_Title :
Microelectromechanical Systems, Journal of
