Two-photon-absorbed near-infrared photopolymerization for three-dimensional microfabrication

Author

Maruo, Shoji ; Kawata, Satoshi

Author_Institution

Dept. of Appl. Phys., Osaka Univ., Japan

Volume

7

Issue

4

fYear

1998

fDate

12/1/1998 12:00:00 AM

Firstpage

411

Lastpage

415

Abstract

We present three-dimensional (3-D) microstructures fabricated from photopolymerizable resin with a resolution of 0.62 μm. The method used to fabricate such small structures has been developed using a femto-second-pulsed near-infrared (IR) laser. Structures such as microcoils and microtubes are presented which demonstrate the effectiveness of our method. In this method, a two-photon absorption process is successfully utilized to confine the solidification of photopolymerizable resin to the focused spot of the laser, which is possible due to the quadratic dependence of the two-photon absorption rate on light intensity. The experimental system, experimental conditions, and related issues for this novel method of photopolymerization are also discussed

Keywords

laser materials processing; micromachining; photochemistry; polymerisation; two-photon processes; 0.62 micron; femtosecond pulsed near infrared laser; microcoil; microtube; photopolymerization; resin; solidification; three-dimensional microfabrication; two photon absorption; Electromagnetic wave absorption; Focusing; Laser beams; Microscopy; Optical materials; Physics; Resins; Stereolithography; Surface emitting lasers; Ultrafast optics;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/84.735349

Filename

735349