Title :
Room temperature growth of crystalline Mn-Zn ferrite thin films by laser ablation technique
Author :
Nakano, Masaki ; Song, Jae Man ; Fukunaga, Hirotoshi ; Matsuo, Yoshio
Author_Institution :
Dept. of Electr. & Electron. Eng., Nagasaki Univ., Japan
fDate :
9/1/2000 12:00:00 AM
Abstract :
A laser ablation technique contained with a shadow mask in Ar atmosphere enables us to obtain crystalline ferrite thin films on glass substrates at room temperature. Investigations on the Ar pressure, PAr, and the distance between the shadow mask from the target, L1, were carried out. The optimum conditions for forming the spinel structure of Mn-Zn ferrite were PAr=20 mTorr and L1=20 mm, respectively
Keywords :
ferrites; magnetic thin films; manganese compounds; pulsed laser deposition; zinc compounds; 20 C; 20 mm; 20 mtorr; Ar; Ar atmosphere; Mn-Zn ferrite; MnZnFe2O4; crystalline Mn-Zn ferrite thin films; crystalline ferrite thin films; glass substrates; laser ablation technique; room temperature; room temperature growth; shadow mask; spinel structure; Argon; Atmosphere; Crystallization; Ferrite films; Glass; Laser ablation; Magnetic films; Magnetic properties; Substrates; Temperature;
Journal_Title :
Magnetics, IEEE Transactions on
