Title :
Four-Terminal Relay Design for Improved Body Effect
Author :
Jeon, Jaeseok ; Nathanael, Rhesa ; Pott, Vincent ; Liu, Tsu-Jae King
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Univ. of California, Berkeley, Berkeley, CA, USA
fDate :
5/1/2010 12:00:00 AM
Abstract :
Previously reported electrostatically actuated four-terminal (4T) relays suffer from a relatively weak body bias effect and undesirable influence of source/drain bias voltages on gate switching voltages. In this letter, an improved 4T relay design is demonstrated to resolve these issues.
Keywords :
semiconductor relays; body effect; four-terminal relay design; gate switching voltages; source/drain bias voltages; Four-terminal (4T) relay; MEMS; NEMS;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/LED.2010.2043497
