DocumentCode
1448977
Title
Four-Terminal Relay Design for Improved Body Effect
Author
Jeon, Jaeseok ; Nathanael, Rhesa ; Pott, Vincent ; Liu, Tsu-Jae King
Author_Institution
Dept. of Electr. Eng. & Comput. Sci., Univ. of California, Berkeley, Berkeley, CA, USA
Volume
31
Issue
5
fYear
2010
fDate
5/1/2010 12:00:00 AM
Firstpage
515
Lastpage
517
Abstract
Previously reported electrostatically actuated four-terminal (4T) relays suffer from a relatively weak body bias effect and undesirable influence of source/drain bias voltages on gate switching voltages. In this letter, an improved 4T relay design is demonstrated to resolve these issues.
Keywords
semiconductor relays; body effect; four-terminal relay design; gate switching voltages; source/drain bias voltages; Four-terminal (4T) relay; MEMS; NEMS;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/LED.2010.2043497
Filename
5437264
Link To Document