• DocumentCode
    1448977
  • Title

    Four-Terminal Relay Design for Improved Body Effect

  • Author

    Jeon, Jaeseok ; Nathanael, Rhesa ; Pott, Vincent ; Liu, Tsu-Jae King

  • Author_Institution
    Dept. of Electr. Eng. & Comput. Sci., Univ. of California, Berkeley, Berkeley, CA, USA
  • Volume
    31
  • Issue
    5
  • fYear
    2010
  • fDate
    5/1/2010 12:00:00 AM
  • Firstpage
    515
  • Lastpage
    517
  • Abstract
    Previously reported electrostatically actuated four-terminal (4T) relays suffer from a relatively weak body bias effect and undesirable influence of source/drain bias voltages on gate switching voltages. In this letter, an improved 4T relay design is demonstrated to resolve these issues.
  • Keywords
    semiconductor relays; body effect; four-terminal relay design; gate switching voltages; source/drain bias voltages; Four-terminal (4T) relay; MEMS; NEMS;
  • fLanguage
    English
  • Journal_Title
    Electron Device Letters, IEEE
  • Publisher
    ieee
  • ISSN
    0741-3106
  • Type

    jour

  • DOI
    10.1109/LED.2010.2043497
  • Filename
    5437264