Fabrication and magnetic properties of electron beam lithography patterned arrays of single crystals

Author

Martín, Jose I. ; Vicent, José L. ; Costa-Krämer, José L. ; Menéndez, José L. ; Cebollada, Alfonso ; Anguita, José V. ; Briones, Fernando

Author_Institution

Dept. de Fisica de Mater., Univ. Complutense de Madrid, Spain

Volume

36

Issue

5

fYear

2000

fDate

9/1/2000 12:00:00 AM

Firstpage

3002

Lastpage

3004

Abstract

The fabrication method of arrays of iron squares separated by submicrometric distances is presented. The magnetic elements are defined on a single crystal Fe(001) film by electron beam lithography followed by a ion beam etching process. The obtained Fe squares present smooth surfaces and homogeneous sizes over areas as large as 500 μm x 500 μm as analyzed by scanning electron and atomic force microscopies. The lateral size of the squares have been varied in the range 1–10 μm in order to analyze the size dependence. The magnetic properties of the single crystalline squares have been studied by magnetooptical Kerr effect. The results reveal an important change in the hysteresis loops as the square dimensions are reduced below a threshold of 3 μm.

Keywords

Kerr magneto-optical effect; arrays; atomic force microscopy; electron beam lithography; ferromagnetic materials; iron; magnetic hysteresis; magnetic particles; scanning electron microscopy; sputter etching; surface topography; 1 to 10 mum; 500 mum; Fe; atomic force microscopy; electron beam lithography patterned arrays; fabrication; fabrication method; homogeneous sizes; hysteresis loops; ion beam etching; magnetic elements; magnetic properties; magnetooptical Kerr effect; scanning electron microscopy; smooth surfaces; submicrometric distances; threshold; Atomic force microscopy; Electron beams; Fabrication; Ion beams; Iron; Lithography; Magnetic analysis; Magnetic films; Magnetic properties; Magnetic separation;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.908656

Filename

908656