Title :
Redox Reaction Switching Mechanism in RRAM Device With
Structure
Author :
Syu, Yong-En ; Chang, Ting-Chang ; Tsai, Tsung-Ming ; Hung, Ya-Chi ; Chang, Kuan-Chang ; Tsai, Ming-Jinn ; Kao, Ming-Jer ; Sze, Simon M.
Author_Institution :
Dept. of Phys., Nat. Sun Yat-Sen Univ., Kaohsiung, Taiwan
fDate :
4/1/2011 12:00:00 AM
Abstract :
This letter investigates the resistive random access memory device characteristics and the physical mechanism of a device with a TiN/CoSiOX/Pt structure. In general, the mechanism is regarded as a redox reaction in the dielectric interface between the Ti electrode and the conductive filament. Furthermore, the switching voltage is correlated only with redox reaction potential. A designed circuit is used to accurately observe the resistance switching process with a pulse generator and an oscilloscope, which reveals that the switching process is related to both time and voltage. The constant switching energy demonstrates that the switching mechanism is the redox reaction.
Keywords :
cobalt compounds; oscilloscopes; platinum; pulse generators; random-access storage; silicon compounds; titanium compounds; Pt-CoSiOX-TiN; RRAM device; conductive filament; constant switching energy; dielectric interface; oscilloscope; physical mechanism; pulse generator; redox reaction switching mechanism; resistance switching process; resistive random access memory device characteristics; Nonvolatile memory; Oscilloscopes; Resistance; Silicon; Switches; Tin; Voltage measurement; Cobalt silicon oxide $(hbox{CoSiO}_{X})$; nonvolatile memory (NVM); redox reaction; resistance switching;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/LED.2011.2104936