• DocumentCode
    1450179
  • Title

    Emitter series resistance from open-collector measurements-influence of the collector region and the parasitic pnp transistor

  • Author

    Gabl, Reinhard ; Reisch, Michael

  • Author_Institution
    Dept. Microelectron., Siemens AG, Munich, Germany
  • Volume
    45
  • Issue
    12
  • fYear
    1998
  • fDate
    12/1/1998 12:00:00 AM
  • Firstpage
    2457
  • Lastpage
    2465
  • Abstract
    The open-collector method for determination of the emitter series resistance in integrated bipolar transistors is analyzed. Existing models do not provide the accuracy required for a correct determination of the emitter series resistance. In order to accurately describe the saturation voltage, a set of model equations is derived that provides a more accurate description of the epitaxial collector region. The measured VCE(IE) characteristic is found to depend on the properties of the collector region as well as the parasitic substrate transistor. Using the model developed, a consistent description of measurement results for different bias conditions of the collector-substrate junction is possible. With this new understanding of the open-collector method, an improved procedure to extract the emitter resistance from measurement data is developed, and results of the method applied to integrated bipolar transistors are presented
  • Keywords
    bipolar transistors; electric resistance measurement; semiconductor device measurement; semiconductor device models; bias conditions; collector region; emitter series resistance; epitaxial collector region; integrated bipolar transistors; model equations; open-collector measurements; parasitic pnp transistor; parasitic substrate transistor; saturation voltage; Bipolar transistors; Data mining; Electrical resistance measurement; Equations; Frequency measurement; Impedance measurement; Microwave measurements; Semiconductor process modeling; Substrates; Voltage;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/16.735722
  • Filename
    735722