DocumentCode
1450179
Title
Emitter series resistance from open-collector measurements-influence of the collector region and the parasitic pnp transistor
Author
Gabl, Reinhard ; Reisch, Michael
Author_Institution
Dept. Microelectron., Siemens AG, Munich, Germany
Volume
45
Issue
12
fYear
1998
fDate
12/1/1998 12:00:00 AM
Firstpage
2457
Lastpage
2465
Abstract
The open-collector method for determination of the emitter series resistance in integrated bipolar transistors is analyzed. Existing models do not provide the accuracy required for a correct determination of the emitter series resistance. In order to accurately describe the saturation voltage, a set of model equations is derived that provides a more accurate description of the epitaxial collector region. The measured VCE(IE) characteristic is found to depend on the properties of the collector region as well as the parasitic substrate transistor. Using the model developed, a consistent description of measurement results for different bias conditions of the collector-substrate junction is possible. With this new understanding of the open-collector method, an improved procedure to extract the emitter resistance from measurement data is developed, and results of the method applied to integrated bipolar transistors are presented
Keywords
bipolar transistors; electric resistance measurement; semiconductor device measurement; semiconductor device models; bias conditions; collector region; emitter series resistance; epitaxial collector region; integrated bipolar transistors; model equations; open-collector measurements; parasitic pnp transistor; parasitic substrate transistor; saturation voltage; Bipolar transistors; Data mining; Electrical resistance measurement; Equations; Frequency measurement; Impedance measurement; Microwave measurements; Semiconductor process modeling; Substrates; Voltage;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/16.735722
Filename
735722
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