Title :
Resonant mechanical magnetic sensor in standard CMOS
Author :
Eyre, B. ; Pister, K.S.J. ; Kaiser, W.
Author_Institution :
Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
Abstract :
A novel micromechanical magnetic sensor has been built and tested. The field is detected by measuring the vibration amplitude of a mechanical Lorentz force oscillator. This device is made from a standard 2-μm CMOS fabrication process with a post-processing etch step to undercut and release the sensor. When operated at the resonant frequency of the mechanical system, a sensitivity of 20 μV/G was measured.
Keywords :
CMOS integrated circuits; magnetic sensors; microsensors; 2 micron; CMOS fabrication process; etching; magnetic field detection; mechanical Lorentz force oscillator; resonant micromechanical magnetic sensor; vibration; Force measurement; Lorentz covariance; Magnetic field measurement; Magnetic resonance; Magnetic sensors; Mechanical variables measurement; Micromechanical devices; Oscillators; Testing; Vibration measurement;
Journal_Title :
Electron Device Letters, IEEE
