Analytical Force Calculations for High-Precision Planar Actuator With Halbach Magnet Array

In this paper, an analytical approach is presented to calculate the magnetic force between the mover and the stator of an electromagnetic planar actuator. The key is to use the coenergy method to calculate the force, in such a way that the stator current can be predicted properly to offer the accurate orientation and location for the real-time control of the high-precision planar actuator. The proposed approach affords the advantage of fast and straightforward computation. Both the simulation with ANSYS finite-element method (FEM) and the experimentation are given to support the validity.