Fabrication of Toroidal Microinductors for RF Applications

Microdevices like microinductors for modern mobile communication electronics working at high frequencies and with sufficient quality factors are of great interest due to their potential benefits in terms of miniaturization and integration into the overall fabrication process. Toroidal microinductors with a magnetic core with high cut-off frequencies and permeabilities consisting of nanostructured composite materials of a magnetic alloy and a polymer fulfill these demands. This paper presents the fabrication of the microinductors by use of thin film deposition techniques, photolithography, electroplating, and etching processes and the integration of sputtered magnetic cores consisting of material with high cut-off frequencies.