Title :
Fabrication of a microengineered quadrupole electrostatic lens
Author :
Syms, R.R.A. ; Tate, T.J. ; Ahmad, M.M. ; Taylor, S.
Author_Institution :
Dept. of Electr. & Electron. Eng., Imperial Coll. of Sci., Technol. & Med., London, UK
fDate :
10/24/1996 12:00:00 AM
Abstract :
A self-aligning method of mounting four parallel cylindrical electrode rods in the geometry of a miniature quadrupole electrostatic lens is described. Pairs of electrode rods are mounted in V-grooves, which are fabricated by anisotropic etching of Si wafers. Two etched dies, separated by further insulating cylindrical spacer rods, comprise a complete lens assembly. For prototype lenses with 500 μm electrode diameter, electrode spacings were maintained to within 3% of their design value, suggesting that this method of construction will allow sufficient precision for such lenses to act its mass analysers in miniaturised quadrupole mass spectrometers
Keywords :
electrostatic lenses; etching; ion optics; mass spectrometer accessories; microelectrodes; micromachining; 500 micron; Si; Si wafers; V-grooves; anisotropic etching; mass analysers; microengineered quadrupole electrostatic lens; miniature lens assembly; mounting technique; parallel cylindrical electrode rods; quadrupole mass spectrometers; self-aligning method;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19961362
