DocumentCode
1452424
Title
Electron beam extraction from a broad-beam vacuum-arc metal plasma source
Author
Oks, Efim M. ; Brown, Ian G.
Author_Institution
Inst. of High-Current Electron., Acad. of Sci., Tomsk, Russia
Volume
26
Issue
5
fYear
1998
fDate
10/1/1998 12:00:00 AM
Firstpage
1562
Lastpage
1565
Abstract
We describe experiments demonstrating the formation of a high current electron beam from a vacuum arc plasma. A preexisting vacuum arc ion source was used, with the extraction voltage reversed in polarity so as to form an electron beam rather than an ion beam; no other changes were required. The beam formed was of energy up to 33 keV, beam current up to 70 A, beam diameter about 10 cm, pulse width 500 μs, and energy density up to 25 J/cm2. This kind of source can be used for material surface modification
Keywords
electron beams; plasma production; vacuum arcs; 33 keV; 70 A; broad-beam vacuum-arc metal plasma source; electron beam extraction; energy density; high current electron beam; material surface modification; preexisting vacuum arc ion source; Cathodes; Electron beams; Ion sources; Plasma density; Plasma immersion ion implantation; Plasma materials processing; Plasma sources; Structural beams; Surface resistance; Vacuum arcs;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/27.736062
Filename
736062
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