DocumentCode :
1454032
Title :
Scanning near-field millimeter-wave microscopy using a metal slit as a scanning probe
Author :
Nozokido, Tatsuo ; Bae, Jongsuck ; Mizuno, Koji
Author_Institution :
Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan
Volume :
49
Issue :
3
fYear :
2001
fDate :
3/1/2001 12:00:00 AM
Firstpage :
491
Lastpage :
499
Abstract :
In this paper, a novel type of scanning near-field millimeter-wave microscopy using a metal slit-type probe is proposed. A tapered reduced-height rectangular waveguide forms the slit aperture, which has a width much smaller than one wavelength λ and length of the order of λ. The slit probe can be operated in the TE10 mode and, thus, results in high transmission efficiency, even when the width is exceedingly small. An image reconstruction algorithm based on computerized tomographic imaging is used to obtain two-dimensional near-field images. Experiments performed at 60 GHz (λ=5 mm) show that image resolution equal to the slit width (~80 μm) is achieved. As an application of this scanning slit microscopy, visualization of transition phenomena of photoexcited free carriers in silicon have been successfully demonstrated, yielding useful information on the dynamics of free carriers in semiconductor materials
Keywords :
computerised tomography; image reconstruction; integrated circuit measurement; millimetre wave measurement; probes; rectangular waveguides; scanning probe microscopy; 5 mm; 60 GHz; 80 micron; Si; TE10 mode; computerized tomographic imaging; free carrier dynamics; image reconstruction algorithm; metal slit; photoexcited free carriers; scanning near-field millimeter-wave microscopy; scanning probe; scanning slit microscopy; slit probe; tapered reduced-height rectangular waveguide; transition phenomena; transmission efficiency; two-dimensional near-field images; Apertures; Application software; High-resolution imaging; Image reconstruction; Image resolution; Microscopy; Probes; Rectangular waveguides; Tellurium; Tomography;
fLanguage :
English
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9480
Type :
jour
DOI :
10.1109/22.910553
Filename :
910553
Link To Document :
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