Title :
Electromagnetic bistable microactuator fabricated on a single wafer
Author :
Xiaodan Miao ; Xuhan Dai ; Peihong Wang ; Yi Huang ; Guifu Ding ; Xiaolin Zhao
Author_Institution :
Nat. Key Lab. of Nano, Shanghai Jiao Tong Univ., Shanghai, China
Abstract :
An electromagnetic bistable microactuator fabricated on a single wafer is presented. Its overall size is 3×3×1×mm. Tested results show that the bistable state of the device is realised by 5 V voltage pulse and held by the permanent magnet without current. The response time is 0.96×ms with a large displacement of 160××m.
Keywords :
electromagnetic actuators; microactuators; permanent magnets; electromagnetic bistable microactuator; permanent magnet; single wafer; size 1 mm; size 3 mm; voltage 5 V;
Journal_Title :
Micro & Nano Letters, IET
DOI :
10.1049/mnl.2011.0572
