High-Performance Shielded Coplanar Waveguides for the Design of CMOS 60-GHz Bandpass Filters

This paper presents optimized very high performance CMOS slow-wave shielded CPW transmission lines (S-CPW TLines). They are used to realize a 60-GHz bandpass filter, with T-junctions and open stubs. Owing to a strong slow-wave effect, the longitudinal length of the S-CPW is reduced by a factor up to 2.6 compared to a classical microstrip topology in the same technology. Moreover, the quality factor of the realized S-CPWs reaches 43 at 60 GHz, which is about two times higher than the microstrip one and corresponds to the state of the art concerning S-CPW TLines with moderate width. For a proof of concept of complex passive device realization, two millimeter-wave filters working at 60 GHz based on dual-behavior-resonator filters have been designed with these S-CPWs and measured up to 110 GHz. The measured insertion loss for the first-order (respectively, second-order) filter is -2.6 dB (respectively, -4.1 dB). The comparison with a classical microstrip topology and the state-of-the-art CMOS filter results highlights the very good performance of the realized filters in terms of unloaded quality factor. It also shows the potential of S-CPW TLines for the design of high-performance complex CMOS passive devices.