Development of thin-film multijunction thermal converters at NIST

Author

Kinard, Joseph R. ; Novomy, D.B. ; Lipe, Thomas E. ; Huang, De-Xiang

Author_Institution

Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA

Volume

46

Issue

2

fYear

1997

fDate

4/1/1997 12:00:00 AM

Firstpage

347

Lastpage

351

Abstract

This paper gives an overview of the development of thin-film multijunction thermal converters (FMJTC´s) at the National Institute of Standards and Technology (NIST). A historical perspective of film thermal converters is presented, followed by descriptions of the motivation, fabrication processes, physical characteristics, and the electrical properties of the FMJTC´s produced at NIST. Integrated micropotentiometers that incorporate FMJTC´s and thermal converters, produced by an alternative fabrication technology using a CMOS foundry, are also described. The paper concludes with a report on the present status of the FMJTC project and future directions

Keywords

measurement standards; microsensors; potentiometers; voltage measurement; CMOS foundry; NIST; electrical properties; fabrication processes; micropotentiometers; microsensors; physical characteristics; thin-film multijunction thermal converters; Biomembranes; Dielectric losses; Fabrication; Heat sinks; Laboratories; NIST; Semiconductor thin films; Silicon; Stress; Transistors;

fLanguage

English

Journal_Title

Instrumentation and Measurement, IEEE Transactions on

Publisher

ieee

ISSN

0018-9456

Type

jour

DOI

10.1109/19.571853

Filename

571853