DocumentCode :
1455736
Title :
Development of thin-film multijunction thermal converters at NIST
Author :
Kinard, Joseph R. ; Novomy, D.B. ; Lipe, Thomas E. ; Huang, De-Xiang
Author_Institution :
Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA
Volume :
46
Issue :
2
fYear :
1997
fDate :
4/1/1997 12:00:00 AM
Firstpage :
347
Lastpage :
351
Abstract :
This paper gives an overview of the development of thin-film multijunction thermal converters (FMJTC´s) at the National Institute of Standards and Technology (NIST). A historical perspective of film thermal converters is presented, followed by descriptions of the motivation, fabrication processes, physical characteristics, and the electrical properties of the FMJTC´s produced at NIST. Integrated micropotentiometers that incorporate FMJTC´s and thermal converters, produced by an alternative fabrication technology using a CMOS foundry, are also described. The paper concludes with a report on the present status of the FMJTC project and future directions
Keywords :
measurement standards; microsensors; potentiometers; voltage measurement; CMOS foundry; NIST; electrical properties; fabrication processes; micropotentiometers; microsensors; physical characteristics; thin-film multijunction thermal converters; Biomembranes; Dielectric losses; Fabrication; Heat sinks; Laboratories; NIST; Semiconductor thin films; Silicon; Stress; Transistors;
fLanguage :
English
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9456
Type :
jour
DOI :
10.1109/19.571853
Filename :
571853
Link To Document :
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