Title :
A MEMS reconfigurable metamaterial for terahertz filter applications
Author :
Zhengli Han ; Kohno, Kenta ; Makela, Tapio ; Haatainen, Tomi ; Fujita, Hideaki ; Hirakawa, Keisuke ; Toshiyoshi, Hiroshi
Author_Institution :
Inst. of Ind. Sci., Univ. of Tokyo, Tokyo, Japan
Abstract :
We propose and demonstrate a tunable terahertz band stop filter by using metamaterial with a reconfiguring RF-MEMS (radio frequency - micro electro mechanical systems) capacitor within the split-ring resonator (SRR) based on electrostatic actuation. The device is compatible with the surface micromachining process.
Keywords :
band-stop filters; micromechanical devices; microwave metamaterials; MEMS reconfigurable metamaterial; RF-MEMS capacitor; electrostatic actuation; radio frequency-microelectromechanical systems; split-ring resonator; surface micromachining process; terahertz filter applications; tunable terahertz band stop filter; Metamaterials; Micromechanical devices; Optical filters; Optical surface waves; Resonant frequency; Resonator filters;
Conference_Titel :
Advanced Electromagnetic Materials in Microwaves and Optics (METAMATERIALS), 2014 8th International Congress on
Conference_Location :
Lyngby
Print_ISBN :
978-1-4799-3450-8
DOI :
10.1109/MetaMaterials.2014.6948554
