DocumentCode
145695
Title
A MEMS reconfigurable metamaterial for terahertz filter applications
Author
Zhengli Han ; Kohno, Kenta ; Makela, Tapio ; Haatainen, Tomi ; Fujita, Hideaki ; Hirakawa, Keisuke ; Toshiyoshi, Hiroshi
Author_Institution
Inst. of Ind. Sci., Univ. of Tokyo, Tokyo, Japan
fYear
2014
fDate
25-28 Aug. 2014
Firstpage
346
Lastpage
348
Abstract
We propose and demonstrate a tunable terahertz band stop filter by using metamaterial with a reconfiguring RF-MEMS (radio frequency - micro electro mechanical systems) capacitor within the split-ring resonator (SRR) based on electrostatic actuation. The device is compatible with the surface micromachining process.
Keywords
band-stop filters; micromechanical devices; microwave metamaterials; MEMS reconfigurable metamaterial; RF-MEMS capacitor; electrostatic actuation; radio frequency-microelectromechanical systems; split-ring resonator; surface micromachining process; terahertz filter applications; tunable terahertz band stop filter; Metamaterials; Micromechanical devices; Optical filters; Optical surface waves; Resonant frequency; Resonator filters;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Electromagnetic Materials in Microwaves and Optics (METAMATERIALS), 2014 8th International Congress on
Conference_Location
Lyngby
Print_ISBN
978-1-4799-3450-8
Type
conf
DOI
10.1109/MetaMaterials.2014.6948554
Filename
6948554
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