Title :
Investigations on ion beams from a high-current ion source
Author :
Ratschko, Dirk ; Zhou, Baoguo G. ; Knolle, Dieter ; Glaser, Michael
Author_Institution :
Phys. Tech. Bundesanstalt, Braunschweig, Germany
fDate :
4/1/1997 12:00:00 AM
Abstract :
An experimental study on an Ar+ beam extracted from a high-current ion source was performed. For beam diagnostics, the beam current and the discharge current as a function of the extraction voltage and of the screening voltage, respectively, were measured. The real two-dimensional beam profile was measured using a multisegmented Faraday cup. A mass spectrum of the ion beam was obtained by adjusting the dipole magnet
Keywords :
argon; current density; ion beams; ion sources; mass spectra; particle beam diagnostics; particle beam extraction; particle traps; Ar; Ar+ ion beam; beam current; beam diagnostics; dipole magnet; discharge current; extraction voltage; high-current ion source; mass spectrum; multisegmented Faraday cup; real two-dimensional beam profile; screening voltage; Argon; Atomic measurements; Current measurement; Electrodes; Ion beams; Ion sources; Lenses; Magnetic flux; Magnetic separation; Voltage;
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
