Title :
Micro-opto-mechanical vibration sensor integrated on silicon
Author :
Ollier, Eric ; Philippe, Paul ; Chabrol, Claude ; Mottier, Patrick
Author_Institution :
CEA, Centre d´´Etudes Nucleaires de Grenoble, France
fDate :
1/1/1999 12:00:00 AM
Abstract :
A new micro-optical vibration sensor has been achieved by combining “integrated optics” and “micromachining” on silicon technologies. The high sensitivity and the wide frequency range have been obtained by using a multimode section in the optical detection circuit. Three prototypes have been installed successfully in an industrial hydroelectric power plant
Keywords :
integrated optics; micro-optics; microsensors; optical signal detection; sensitivity; silicon; vibration measurement; high sensitivity; industrial hydroelectric power plant; integrated optics; micro-opto-mechanical vibration sensor; micromachining; multimode section; optical detection circuit; silicon; silicon technologies; wide frequency range; Electromagnetic fields; Frequency; Microstructure; Optical fibers; Optical interferometry; Optical modulation; Optical sensors; Silicon; Temperature sensors; Transducers;
Journal_Title :
Lightwave Technology, Journal of
