DocumentCode
1457659
Title
Micro-opto-mechanical vibration sensor integrated on silicon
Author
Ollier, Eric ; Philippe, Paul ; Chabrol, Claude ; Mottier, Patrick
Author_Institution
CEA, Centre d´´Etudes Nucleaires de Grenoble, France
Volume
17
Issue
1
fYear
1999
fDate
1/1/1999 12:00:00 AM
Firstpage
26
Lastpage
29
Abstract
A new micro-optical vibration sensor has been achieved by combining “integrated optics” and “micromachining” on silicon technologies. The high sensitivity and the wide frequency range have been obtained by using a multimode section in the optical detection circuit. Three prototypes have been installed successfully in an industrial hydroelectric power plant
Keywords
integrated optics; micro-optics; microsensors; optical signal detection; sensitivity; silicon; vibration measurement; high sensitivity; industrial hydroelectric power plant; integrated optics; micro-opto-mechanical vibration sensor; micromachining; multimode section; optical detection circuit; silicon; silicon technologies; wide frequency range; Electromagnetic fields; Frequency; Microstructure; Optical fibers; Optical interferometry; Optical modulation; Optical sensors; Silicon; Temperature sensors; Transducers;
fLanguage
English
Journal_Title
Lightwave Technology, Journal of
Publisher
ieee
ISSN
0733-8724
Type
jour
DOI
10.1109/50.737417
Filename
737417
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