Guided-wave acoustooptic interaction with phase modulation in a ZnO thin-film transducer on an Si-based integrated Mach-Zehnder interferometer

Author

Bonnotte, E. ; Gorecki, Christophe ; Toshiyoshi, Hiroshi ; Kawakatsu, H. ; Fujita, H. ; Wörhoff, Kerstin ; Hashimoto, K.

Author_Institution

Inst. of Ind. Sci., Tokyo Univ., Japan

Volume

17

Issue

1

fYear

1999

fDate

1/1/1999 12:00:00 AM

Firstpage

35

Lastpage

42

Abstract

This paper presents the design and the realization of a novel integrated Mach-Zehnder interferometer (MZI) with heterodyne scheme. Well-controlled machining as well as ZnO thin-film transducer integration on the same Si substrate permits to transform an optically passive device to an active device with sinusoidal phase modulation. Theoretical and experimental results are presented, demonstrating that an efficient sensor can be designed and fabricated

Keywords

Mach-Zehnder interferometers; acousto-optical devices; electro-optical modulation; integrated optics; micro-optics; micromachining; optical films; optical sensors; phase modulation; silicon; transducers; Si; Si-based integrated Mach-Zehnder interferometer; ZnO; ZnO thin-film transducer; ZnO thin-film transducer integration; active device; guided-wave acoustooptic interaction; heterodyne scheme; integrated Mach-Zehnder interferometer; n; optical sensor design; optically passive device; phase modulation; sinusoidal phase modulation; Acoustic transducers; Integrated optics; Machining; Optical devices; Optical mixing; Phase modulation; Semiconductor thin films; Substrates; Thin film devices; Zinc oxide;

fLanguage

English

Journal_Title

Lightwave Technology, Journal of

Publisher

ieee

ISSN

0733-8724

Type

jour

DOI

10.1109/50.737419

Filename

737419