Characterization of the slot antenna microwave plasma source

Author

Wu, Cong-Feng ; Zhan, Ru-Juan ; Wen, Xiao-Hui ; Huang, Wei-Dong

Author_Institution

Structure Res. Lab., Univ. of Sci. & Technol. of China, Hefei, China

Volume

29

Issue

1

fYear

2001

fDate

2/1/2001 12:00:00 AM

Firstpage

13

Lastpage

18

Abstract

An annular ring slot antenna is used as the generation of large-volume 2.45-GHz microwave plasma. With argon, a surface wave at the quartz tube can be excited above 250 W. Optical emissions testify the existence of azimuthal modes of m=4 at a pressure of 10 Pa and m=6 at a pressure of 230 Pa. An important conclusion that the uniformity of electromagnetic field in plasma has a dependence on the value of plasma density has been acquired based on theoretical calculations under low pressures. Meanwhile, the efficiency of the plasma source is investigated experimentally. Especially, the spatial distribution of plasma parameter show that homogeneous plasma cylinder with a diameter of 160 mm has been successfully produced at the pressure of 10-1000 Pa

Keywords

Langmuir probes; antennas in plasma; argon; plasma density; plasma electromagnetic wave propagation; plasma pressure; plasma production; slot antennas; 10 Pa; 10 to 1000 Pa; 160 mm; 2.45 GHz; 230 Pa; 250 W; Ar; annular ring slot antenna; azimuthal modes; efficiency; electromagnetic field; homogeneous plasma cylinder; large-volume microwave plasma; optical emissions; plasma; plasma density; plasma parameter; plasma source; pressure; quartz tube; slot antenna microwave plasma source; spatial distribution; surface wave; uniformity; Argon; Microwave antennas; Microwave generation; Optical surface waves; Plasma density; Plasma sources; Plasma waves; Slot antennas; Stimulated emission; Surface waves;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/27.912936

Filename

912936