DocumentCode
1460574
Title
Solid state [Semiconductors. 1999 technology analysis and forecast]
Author
Geppert, L.
Volume
36
Issue
1
fYear
1999
Firstpage
52
Lastpage
56
Abstract
This article presents a solid-state semiconductor technology analysis and forecast for 1999. The subjects covered include semiconductor technology roadmap targets, silicon-germanium components, silicon-on-insulator ICs, copper IC interconnects and microelectromechanical systems.
Keywords
Ge-Si alloys; integrated circuit interconnections; micromechanical devices; semiconductor technology; silicon-on-insulator; technological forecasting; copper IC interconnects; microelectromechanical systems; roadmap targets; silicon-germanium components; silicon-on-insulator ICs; solid-state semiconductor technology; technology analysis; technology forecast; Annealing; Capacitance; Commercialization; Costs; Energy consumption; Semiconductor films; Silicon compounds; Silicon on insulator technology; Solid state circuits; Switches;
fLanguage
English
Journal_Title
Spectrum, IEEE
Publisher
ieee
ISSN
0018-9235
Type
jour
DOI
10.1109/6.738326
Filename
738326
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