DocumentCode :
146149
Title :
Study of surface weak spots on SiC Schottky Diodes under specific operating regimes by Infrared Lock-in sensing
Author :
Leon, Javier ; Perpina, Xavier ; Vellvehi, Miquel ; Jorda, Xavier ; Godignon, P.
Author_Institution :
IMB, Syst. Integration Dept., Centre Nac. de Microelectron., Bellaterra, Spain
fYear :
2014
fDate :
22-26 Sept. 2014
Firstpage :
385
Lastpage :
388
Abstract :
Several Silicon Carbide Schottky Barrier Diodes (SBDs) were inspected by Infrared Lock-In Thermography to study and determine the origin of structural weak spots resulting from their manufacturing and electro-thermal stressing tests. These spots are frequency modulated following three different approaches representative of their operating conditions and detected by their infrared emission, as they behave as hot spots. Such weak spots could have originated from barrier modification due to wire-bonding process, non-uniform active area resistance for bad metallization electrical contact, deep level traps creation due to high energy implantation in the edge termination, and internal crack propagation during thermal cycling.
Keywords :
Schottky barriers; Schottky diodes; infrared imaging; lead bonding; metallisation; silicon compounds; wide band gap semiconductors; Schottky barrier diodes; SiC; barrier modification; deep level traps; electrothermal stressing tests; infrared emission; infrared lockin sensing; internal crack propagation; metallization electrical contact; specific operating regimes; structural weak spots; surface weak spots; thermal cycling; Heating; Leakage currents; Modulation; Schottky barriers; Schottky diodes; Silicon carbide; Infrared Thermography; Schottky Diodes; SiC; weak spot detection;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid State Device Research Conference (ESSDERC), 2014 44th European
Conference_Location :
Venice
ISSN :
1930-8876
Print_ISBN :
978-1-4799-4378-4
Type :
conf
DOI :
10.1109/ESSDERC.2014.6948841
Filename :
6948841
Link To Document :
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