DocumentCode
146149
Title
Study of surface weak spots on SiC Schottky Diodes under specific operating regimes by Infrared Lock-in sensing
Author
Leon, Javier ; Perpina, Xavier ; Vellvehi, Miquel ; Jorda, Xavier ; Godignon, P.
Author_Institution
IMB, Syst. Integration Dept., Centre Nac. de Microelectron., Bellaterra, Spain
fYear
2014
fDate
22-26 Sept. 2014
Firstpage
385
Lastpage
388
Abstract
Several Silicon Carbide Schottky Barrier Diodes (SBDs) were inspected by Infrared Lock-In Thermography to study and determine the origin of structural weak spots resulting from their manufacturing and electro-thermal stressing tests. These spots are frequency modulated following three different approaches representative of their operating conditions and detected by their infrared emission, as they behave as hot spots. Such weak spots could have originated from barrier modification due to wire-bonding process, non-uniform active area resistance for bad metallization electrical contact, deep level traps creation due to high energy implantation in the edge termination, and internal crack propagation during thermal cycling.
Keywords
Schottky barriers; Schottky diodes; infrared imaging; lead bonding; metallisation; silicon compounds; wide band gap semiconductors; Schottky barrier diodes; SiC; barrier modification; deep level traps; electrothermal stressing tests; infrared emission; infrared lockin sensing; internal crack propagation; metallization electrical contact; specific operating regimes; structural weak spots; surface weak spots; thermal cycling; Heating; Leakage currents; Modulation; Schottky barriers; Schottky diodes; Silicon carbide; Infrared Thermography; Schottky Diodes; SiC; weak spot detection;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference (ESSDERC), 2014 44th European
Conference_Location
Venice
ISSN
1930-8876
Print_ISBN
978-1-4799-4378-4
Type
conf
DOI
10.1109/ESSDERC.2014.6948841
Filename
6948841
Link To Document