• DocumentCode
    146149
  • Title

    Study of surface weak spots on SiC Schottky Diodes under specific operating regimes by Infrared Lock-in sensing

  • Author

    Leon, Javier ; Perpina, Xavier ; Vellvehi, Miquel ; Jorda, Xavier ; Godignon, P.

  • Author_Institution
    IMB, Syst. Integration Dept., Centre Nac. de Microelectron., Bellaterra, Spain
  • fYear
    2014
  • fDate
    22-26 Sept. 2014
  • Firstpage
    385
  • Lastpage
    388
  • Abstract
    Several Silicon Carbide Schottky Barrier Diodes (SBDs) were inspected by Infrared Lock-In Thermography to study and determine the origin of structural weak spots resulting from their manufacturing and electro-thermal stressing tests. These spots are frequency modulated following three different approaches representative of their operating conditions and detected by their infrared emission, as they behave as hot spots. Such weak spots could have originated from barrier modification due to wire-bonding process, non-uniform active area resistance for bad metallization electrical contact, deep level traps creation due to high energy implantation in the edge termination, and internal crack propagation during thermal cycling.
  • Keywords
    Schottky barriers; Schottky diodes; infrared imaging; lead bonding; metallisation; silicon compounds; wide band gap semiconductors; Schottky barrier diodes; SiC; barrier modification; deep level traps; electrothermal stressing tests; infrared emission; infrared lockin sensing; internal crack propagation; metallization electrical contact; specific operating regimes; structural weak spots; surface weak spots; thermal cycling; Heating; Leakage currents; Modulation; Schottky barriers; Schottky diodes; Silicon carbide; Infrared Thermography; Schottky Diodes; SiC; weak spot detection;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid State Device Research Conference (ESSDERC), 2014 44th European
  • Conference_Location
    Venice
  • ISSN
    1930-8876
  • Print_ISBN
    978-1-4799-4378-4
  • Type

    conf

  • DOI
    10.1109/ESSDERC.2014.6948841
  • Filename
    6948841