DocumentCode :
1462602
Title :
Inside front cover
Author :
Ishizuka, Hiroyasu ; Okuyama, Kousuke ; Kubota, Katsuhiko ; Komuro, Masamichi ; Hara, Yuji
Author_Institution :
Hatachi ULSI Syst. Co., Tokyo, Japan
Volume :
21
Issue :
4
fYear :
1998
Abstract :
We examined various electrostatic discharge (ESD) protection devices for input pins in the case of floating body substrates to discuss optimal structures effective to both of the machine model (MM) and human body model (HBRM) ESD stresses. Because of a small series resistance, we observed oscillation alternating from positive to negative in the current waveforms during MM stress, leading to weak polarity dependence of ESD performance which is inconsistent with the results for HEM tests. As a result, protection devices effective to both HEM and MM should be robust to bipolar stress. As one of the candidates, we propose a combination of PN diode and thyristor.
Keywords :
bipolar transistors; electrostatic discharge; integrated circuit testing; protection; semiconductor diodes; thyristors; ESD protection device; HBM test; MM test; PN diode; discharge; floating body substrate; human body model; input pin; lateral bipolar transistor; machine model; thyristor; Biological system modeling; Diodes; Electrostatic discharge; Humans; Immune system; Pins; Protection; Robustness; Stress; Testing;
fLanguage :
English
Journal_Title :
Components, Packaging, and Manufacturing Technology, Part C, IEEE Transactions on
Publisher :
ieee
ISSN :
1083-4400
Type :
jour
DOI :
10.1109/3476.739170
Filename :
739170
Link To Document :
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