Simultaneous estimation of sample surface topography and elasticity utilizing contact-mode AFM

Atomic Force Microscope (AFM) is the device which can be applied to measure the surface topography of samples in nano-scale. Because the cantilever holds its physical contact with samples, it is also possible to measure elasticity of samples in principle. However, compared with the implovement of scanning performance, the technologies for viscosity and elasticity measurements are still underdeveloped. The proposal method measures the surface topography in forward scan (FWS) and the elasticity in backward scan (BWS). Furthermore, this paper introduces Surface Topography Observer (STO) and Perfect Tracking Control (PTC) in order to improve accuracy of the measurement.