Title :
Device and Integration Technology for Silicon Photonic Transmitters
Author :
Park, Hyundai ; Sysak, Matthew N. ; Chen, Hui-Wen ; Fang, Alexander W. ; Liang, Di ; Liao, Ling ; Koch, Brian R. ; Bovington, Jock ; Tang, Yongbo ; Wong, Kristi ; Jacob-Mitos, Matt ; Jones, Richard ; Bowers, John E.
Author_Institution :
Photonics Technol. Lab., Intel Corp., Santa Clara, CA, USA
Abstract :
The device and integration technology for silicon photonic transmitters are reviewed in this paper. The hybrid silicon platform enables on-chip lasers to be fabricated with silicon photonic circuits and can be integrated in the CMOS back-end flow. Laser arrays from multiple die bonding and quantum well intermixing techniques are demonstrated to extend the spectral bandwidth from the laser array of the transmitter. Two modulator technologies, silicon modulators and hybrid silicon modulators, are also described.
Keywords :
CMOS integrated circuits; elemental semiconductors; integrated optics; microassembling; optical fabrication; optical modulation; optical transmitters; quantum well lasers; semiconductor laser arrays; silicon; CMOS back-end flow; Si; hybrid silicon modulators; integration technology; laser arrays; modulator technologies; multiple die bonding; on-chip lasers; quantum well intermixing techniques; silicon photonic circuits; silicon photonic transmitters; spectral bandwidth; Gratings; Lasers; Measurement by laser beam; Optical waveguides; Photonics; Silicon; Waveguide lasers; Optoelectronic devices; photonic integration; semiconductor lasers; silicon photonics;
Journal_Title :
Selected Topics in Quantum Electronics, IEEE Journal of
DOI :
10.1109/JSTQE.2011.2106112
