DocumentCode
1463544
Title
Investigation of relationship between 2DEG density and reverse leakage current in AlGaN/GaN schottky barrier diodes
Author
Terano, Akihisa ; Tsuchiya, Takao ; Mochizuki, K.
Author_Institution
Central Res. Lab., Hitachi, Ltd., Tokyo, Japan
Volume
48
Issue
5
fYear
2012
Firstpage
274
Lastpage
275
Abstract
The influence of the density of two-dimensional electron gas (ns) formed in AlGaN/GaN-based planar Schottky barrier diodes (SBDs) on the reverse leakage current (IR) was investigated by fabricating SBDs with three different AlN mole fractions in the AlGaN layers. It was found that IR decreased exponentially with the reduction of ns; e.g. IR decreased by seven orders of magnitude simply by reducing ns from 1.0×1013 to 3.6×1012 cm-2.
Keywords
III-V semiconductors; Schottky diodes; aluminium compounds; electron gas; gallium compounds; leakage currents; wide band gap semiconductors; 2DEG density; AlGaN-GaN; SBD fabrication; Schottky barrier diodes; reverse leakage current; two-dimensional electron gas density;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el.2011.3919
Filename
6164323
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