Closed-loop silicon accelerometers

Author

Kraft, M. ; Lewis, C.P. ; Hesketh, T.G.

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA

Volume

145

Issue

5

fYear

1998

fDate

10/1/1998 12:00:00 AM

Firstpage

325

Lastpage

331

Abstract

The control-system structure and behaviour are considered for an analogue and a digital servo-accelerometer having a dynamic range from mg to several g (1g=9.81 ms^-2), for use in low-frequency applications. The paper emphasises the derivation of mathematical models, which are presented together with simulated and test results obtained from the implementation of these strategies on a bulk-micromachined silicon sensing element employing capacitive signal pick-off. The digital device, which is based upon oversampling conversion, proved to have superior stability compared to the analogue accelerometer. Furthermore, it has the advantages of producing a direct digital output signal and an inherent self-test feature

Keywords

accelerometers; closed loop systems; elemental semiconductors; micromachining; microsensors; physical instrumentation control; servomechanisms; silicon; Si; analogue device; bulk micromachining; capacitive signal pick-off; closed loop silicon accelerometer; control system; digital device; dynamic range; low-frequency application; mathematical model; oversampling conversion; self-testing; sensing element; servo;

fLanguage

English

Journal_Title

Circuits, Devices and Systems, IEE Proceedings -

Publisher

iet

ISSN

1350-2409

Type

jour

DOI

10.1049/ip-cds:19982275

Filename

739675