Title :
Closed-loop silicon accelerometers
Author :
Kraft, M. ; Lewis, C.P. ; Hesketh, T.G.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA
fDate :
10/1/1998 12:00:00 AM
Abstract :
The control-system structure and behaviour are considered for an analogue and a digital servo-accelerometer having a dynamic range from mg to several g (1g=9.81 ms-2), for use in low-frequency applications. The paper emphasises the derivation of mathematical models, which are presented together with simulated and test results obtained from the implementation of these strategies on a bulk-micromachined silicon sensing element employing capacitive signal pick-off. The digital device, which is based upon oversampling conversion, proved to have superior stability compared to the analogue accelerometer. Furthermore, it has the advantages of producing a direct digital output signal and an inherent self-test feature
Keywords :
accelerometers; closed loop systems; elemental semiconductors; micromachining; microsensors; physical instrumentation control; servomechanisms; silicon; Si; analogue device; bulk micromachining; capacitive signal pick-off; closed loop silicon accelerometer; control system; digital device; dynamic range; low-frequency application; mathematical model; oversampling conversion; self-testing; sensing element; servo;
Journal_Title :
Circuits, Devices and Systems, IEE Proceedings -
DOI :
10.1049/ip-cds:19982275
