Title :
Acoustic wave technology sensors
Author_Institution :
Microsensor Syst. Inc., Apopka, FL, USA
fDate :
4/1/2001 12:00:00 AM
Abstract :
A brief overview of acoustic wave sensor physics, materials, sensor types, and applications is presented in this paper. Emphasis is placed on the different types of acoustic wave sensors, their respective advantages, and their specific applications in industry
Keywords :
bulk acoustic wave devices; reviews; sensors; surface acoustic wave sensors; BAW sensors; SAW sensors; acoustic wave technology sensors; sensor applications; Acoustic materials; Acoustic propagation; Acoustic sensors; Acoustic waves; Biosensors; Mechanical sensors; Piezoelectric materials; Sensor phenomena and characterization; Surface acoustic waves; Temperature sensors;
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
