• DocumentCode
    1464324
  • Title

    Ta _{2} O _{5} Solar-Blind Photodetectors

  • Author

    Chiu, C.J. ; Weng, W.Y. ; Hsueh, T.J. ; Chang, S.J. ; Huang, G.J. ; Hsueh, H.T.

  • Author_Institution
    Dept. of Electr. Eng., Nat. Cheng Kung Univ., Tainan, Taiwan
  • Volume
    11
  • Issue
    10
  • fYear
    2011
  • Firstpage
    2372
  • Lastpage
    2373
  • Abstract
    The authors report the fabrication of Ta2O5 solar-blind photodetectors. It was found that one can transformation amorphous Ta2O5 to crystalline β-Ta2O5 through high-temperature (i.e., >; 700°C) annealing. It was also found that ultraviolet-to-visible rejection ratio of the 900°C-annealed sample was around 9.2 ×102 when biased at 10 V.
  • Keywords
    annealing; crystallisation; photodetectors; tantalum compounds; ultraviolet detectors; Ta2O5; amorphous-Ta2O5-crystalline-β-Ta2O5 transformation; high-temperature annealing; solar-blind photodetectors; temperature 900 degC; ultraviolet-to-visible rejection ratio; voltage 10 V; Annealing; Dark current; Films; Photodetectors; Temperature measurement; X-ray scattering; Photodetectors; Ta$_{2}$O$_{5}$ ; solar-blind;
  • fLanguage
    English
  • Journal_Title
    Sensors Journal, IEEE
  • Publisher
    ieee
  • ISSN
    1530-437X
  • Type

    jour

  • DOI
    10.1109/JSEN.2011.2122332
  • Filename
    5723681
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1464324