DocumentCode :
1464324
Title :
Ta 
O 
Solar-Blind Photodetectors
Author :
Chiu, C.J. ; Weng, W.Y. ; Hsueh, T.J. ; Chang, S.J. ; Huang, G.J. ; Hsueh, H.T.
Author_Institution :
Dept. of Electr. Eng., Nat. Cheng Kung Univ., Tainan, Taiwan
Volume :
11
Issue :
10
fYear :
2011
Firstpage :
2372
Lastpage :
2373
Abstract :
The authors report the fabrication of Ta2O5 solar-blind photodetectors. It was found that one can transformation amorphous Ta2O5 to crystalline β-Ta2O5 through high-temperature (i.e., >; 700°C) annealing. It was also found that ultraviolet-to-visible rejection ratio of the 900°C-annealed sample was around 9.2 ×102 when biased at 10 V.
Keywords :
annealing; crystallisation; photodetectors; tantalum compounds; ultraviolet detectors; Ta2O5; amorphous-Ta2O5-crystalline-β-Ta2O5 transformation; high-temperature annealing; solar-blind photodetectors; temperature 900 degC; ultraviolet-to-visible rejection ratio; voltage 10 V; Annealing; Dark current; Films; Photodetectors; Temperature measurement; X-ray scattering; Photodetectors; Ta$_{2}$ $_{5}$
fLanguage :
English
Journal_Title :
Sensors Journal, IEEE
Publisher :
ieee
ISSN :
1530-437X
Type :
jour
DOI :
10.1109/JSEN.2011.2122332
Filename :
5723681
Link To Document :
