Title :
Ohmic contacts to semiconducting diamond
Author :
Moazed, K.L. ; Nguyen, Richard ; Zeidler, James R.
Author_Institution :
North Carolina State Univ., Raleigh, NC, USA
fDate :
7/1/1988 12:00:00 AM
Abstract :
A solid-state reaction process for producing ohmic contacts to polished natural semiconducting diamond surfaces is discussed. The approach attempts to systematically characterize the processes which occur when metallic films of known thickness are deposited on a smooth diamond surface and annealed in the solid state under controlled conditions. Annealed tantalum/gold and titanium/gold deposits on
Keywords :
annealing; diamond; elemental semiconductors; gold; ohmic contacts; semiconductor-metal boundaries; tantalum; titanium; Ta-Au-C; Ti-Au-C; annealing; metallic films; metallography; ohmic contacts; scanning electron microscopy; secondary ion mass spectrometry; semiconducting diamond; solid-state reaction process; Annealing; Control systems; Gold; Ohmic contacts; Semiconductivity; Semiconductor films; Solid state circuits; Surface resistance; Thickness control; Titanium;
Journal_Title :
Electron Device Letters, IEEE
