Modeling and compensation for hysteresis properties in piezoelectric actuators

This paper presents a modeling and compensation approach for hysteresis properties in piezoelectric actuators. Nonlinearities due to the hysteresis and creep phenomena inherently exist in the piezoelectric actuator, resulting in the low control performance in positioning and/or tracking accuracy. In this paper, at first, the hysteresis property is mathematically modeled by Prandtl-Ishlinskii model. Based on the mathematical hysteresis model, an inverse model-based compensator combined with linear feedback controller is applied to compensate for the nonlinearities in piezoelectric actuator. The proposed approach has been evaluated by experiments using a piezo-actuated stage.