DocumentCode
1465196
Title
Integration and interconnect technology at IEDM ´96
Volume
12
Issue
6
fYear
1996
Firstpage
33
Keywords
Consumer electronics; Electron devices; Electronics industry; Industrial control; Integrated circuit interconnections; Paper technology; Power transistors; Silicon; Substrates; X-ray lithography;
fLanguage
English
Journal_Title
Circuits and Devices Magazine, IEEE
Publisher
ieee
ISSN
8755-3996
Type
jour
DOI
10.1109/MCD.1996.544449
Filename
544449
Link To Document