DocumentCode :
1465196
Title :
Integration and interconnect technology at IEDM ´96
Volume :
12
Issue :
6
fYear :
1996
Firstpage :
33
Keywords :
Consumer electronics; Electron devices; Electronics industry; Industrial control; Integrated circuit interconnections; Paper technology; Power transistors; Silicon; Substrates; X-ray lithography;
fLanguage :
English
Journal_Title :
Circuits and Devices Magazine, IEEE
Publisher :
ieee
ISSN :
8755-3996
Type :
jour
DOI :
10.1109/MCD.1996.544449
Filename :
544449
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1465196
