Abstract :
The first fully micromachined, silicon-based substrate integrated waveguide (SIW) structure for millimetre-wave applications has been demonstrated by researchers from Chung-Ang University in Korea. “We believe that the proposed SIW structure can provide a very useful, versatile platform for millimetre-wave tunable SIW-based circuits,“ said Professor Chang-Wook Baek who has led this project. “Since the process is based on the micromachining technique, it is completely compatible with silicon technology and can be easily integrated with MEMS devices using a relatively simple process“.
Keywords :
circuit tuning; elemental semiconductors; micromachining; micromechanical devices; millimetre wave integrated circuits; silicon; substrate integrated waveguides; MEMS device; micromachining; millimetre-wave tunable SIW-based circuit; silicon SIW structure; silicon-based substrate integrated waveguide structure;
