Membrane-supported CPW with mounted active devices

Author

Liu, W.Y. ; Steenson, D. ; Steer, M.B.

Author_Institution

Sch. of Electr. & Comput. Eng., Leeds Univ., UK

Volume

11

Issue

4

fYear

2001

fDate

4/1/2001 12:00:00 AM

Firstpage

167

Lastpage

169

Abstract

This paper reports the fabrication of printed circuit lines on a 5 μm thick membrane that minimizes dielectric loss and effectively eliminates surface modes, both of which are important for operation at millimeter-wave and submillimeter-wave frequencies. The relatively low-cost low-temperature process uses a photosensitive resin (SU-8) to form the membrane and enables devices to be mounted on it.

Keywords

coplanar waveguides; dielectric losses; mechanical stability; membranes; micromachining; millimetre wave circuits; photolithography; printed circuit manufacture; submillimetre wave circuits; 5 micron; EHF; SU-8; THF; dielectric loss minimisation; low-cost microfabrication; low-temperature process; membrane-supported CPW; millimeter-wave frequencies; mounted active devices; photosensitive resin; planar printed circuits; printed circuit lines; submillimeter-wave frequencies; surface modes elimination; suspended CPW; Biomembranes; Coplanar waveguides; Dielectric losses; Distributed parameter circuits; Fabrication; Frequency; Planar transmission lines; Printed circuits; Resins; Silver;

fLanguage

English

Journal_Title

Microwave and Wireless Components Letters, IEEE

Publisher

ieee

ISSN

1531-1309

Type

jour

DOI

10.1109/7260.916332

Filename

916332