System design considerations for MEMS-actuated magnetic-probe-based mass storage

Author

Carley, L. Richard ; Ganger, Greg ; Guillou, David F. ; Nagle, David

Author_Institution

Dept. of Electr. & Comput. Eng., Carnegie Mellon Univ., Pittsburgh, PA, USA

Volume

37

Issue

2

fYear

2001

fDate

3/1/2001 12:00:00 AM

Firstpage

657

Lastpage

662

Abstract

This paper presents common system design considerations imposed on magnetic storage devices that employ MEMS devices for positioning of a magnetic probe device over a magnetic media. The paper demonstrates that active servo control of the probe tip to media separation can be achieved with sub-nanometer accuracy. It demonstrates that reasonable-size capacitive sensors can resolve probe tip motions with a noise floor of roughly 22 picometers, allowing them to be used as position sensors in magnetic force microscope (MFM) readout approaches. In addition, this paper demonstrates that although MEMS media actuators can achieve scanning ranges of ±50 um, the mass of the media sled imposes important access time and data rate constraints on such MEMS-actuated mass storage devices

Keywords

capacitive sensors; magnetic force microscopy; magnetic storage; microactuators; probes; servomechanisms; MEMS-actuated magnetic-probe-based mass storage; access time; active servo control; capacitive sensors; data rate constraints; magnetic force microscope; magnetic media; media separation; noise floor; position sensors; probe tip; scanning ranges; sub-nanometer accuracy; system design considerations; Capacitive sensors; Magnetic devices; Magnetic force microscopy; Magnetic memory; Magnetic noise; Magnetic sensors; Magnetic separation; Microelectromechanical devices; Probes; Servosystems;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.917597

Filename

917597