Title :
Semiconducting YBaCuO pyroelectric infrared detectors on suspended Si3N4 films
Author :
Gray, J.E. ; Butler, Donald P. ; Celik-Butler, Zeynep
Author_Institution :
Dept. of Electr. Eng., Southern Methodist Univ., Dallas, TX
fDate :
10/29/1998 12:00:00 AM
Abstract :
Uncooled, micromachined pyroelectric infrared detectors based on semiconducting YBaCuO were fabricated and characterised at room temperature. The detectors were fabricated with CMOS compatible techniques that demonstrate a future ability to fabricate low-cost focal plane arrays. Pyroelectric coefficients were measured to be as high as 4.1 μC/cm2K and detectivities over 108·cm Hz1/2/W were measured
Keywords :
pyroelectric detectors; CMOS compatible techniques; IR detectivities; YBaCuO-Si3N4; focal plane arrays; micromachining; polycrystalline thin films; pyroelectric infrared detector; suspended Si3N4 films;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19981455
