Title :
Silicon MEMS Oscillators for High-Speed Digital Systems
Author :
Tabatabaei, Sassan ; Partridge, Aaron
Author_Institution :
SiTime Corp., Sunnyvale, CA, USA
Abstract :
Recent advances in microelectromechanical system (MEMS) manufacturing and circuit design techniques have propelled MEMS-based silicon oscillators into the mainstream of electronic components. This article discusses the reasons for this trend, which include size, reliability, mass manufacturability, and performance advantages in various digital applications, such as processors and parallel and serial interfaces.
Keywords :
micromechanical devices; monolithic integrated circuits; oscillators; semiconductor device manufacture; circuit design techniques; high-speed digital systems; microelectromechanical system manufacturing; parallel interfaces; serial interfaces; silicon MEMS oscillators; Circuits; Costs; Digital systems; Electrodes; Frequency; Manufacturing processes; Micromechanical devices; Oscillators; Silicon; Temperature sensors; MEMS packaging; MEMS resonator; clock; digital clocking; hardware; microelectromechanical systems; oscillator; serial interfaces; silicon oscillator;
Journal_Title :
Micro, IEEE
