Interval Modeling and Robust Control of Piezoelectric Microactuators

Microsystems are very sensitive to environmental disturbances (thermal variation, surrounding vibration, micro-objects in contact with them, etc.) and they are often subjected to small degradation or their behaviors are often affected during the functioning. As a result, their parameters often change during the micromanipulation, microassembly, or measurement tasks and the accuracy or even the stability may be lost. For that, robust control laws should be introduced to control them and to ensure the performance.